Solar, Thin Film, Etching, Diffusion
series:Electric decomposing process exhaust, versatile and more convenient, but the temperature does not exceed 1000 ° C.
基本情報Local Scrubber
Advantage:
Pre-wet scrubber design,high removal efficiency.
Pre-heating design,high destruction efficiency.Electric heater type gas abatement system.
Perfect abatement efficiency for flammable &water soluble gases
Minimizing moisture vapor exhaust (Apply dry system)
Excellent safety interlock system
Longer maintains cycle .Simple operation and easy maintenance time.
Relatively lower operation cost(Longer life heater easy to PM)
価格帯 | お問い合わせください |
---|---|
納期 | お問い合わせください |
型番・ブランド名 | Wet-Thermal-wet |
用途/実績例 | TSMC |
取扱企業Local Scrubber
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