Film Deposition&Heat Treatment

Equipped with various film depositi…

PBII is suitable for carbon film for pre-annealing of SiC, RTA is for annealing....Film formation ・ PBII (Plasma Based Ion Implantation) Carbon deposition ・ Sputter Possible to form elect...

メーカー・取り扱い企業： 株式会社イオンテクノセンター

Implantation Simulation

Simulation for ion species, depth a…

Customer's request "How much energy and dose should be used to achieve the desired depth and concentration?" And "What depth distribution of dopant ions will be given at the specified energy and dose....

メーカー・取り扱い企業： 株式会社イオンテクノセンター